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  • ULVAC Launches the Optius Optical Process Monitor

    Published on April 10, 2014

    Chigasaki: ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa, Japan; President and CEO: Hisaharu Obinata; hereafter referred to as ULVAC) is pleased to announce that on April 10, 2014, starts sales of an optical process monitor, Optius, which can be used for various plasma processes.

    Background

    Plasma processes such as sputtering, CVD, and etching are used in many types of manufacturing systems for semiconductors, flat panel displays, and solar panels. In order to obtain high-quality and stable film deposition or etching, plasma emission spectra have to be accurately monitored to control the manufacturing system appropriately. There has been a growing demand for plasma process monitoring devices recently because their importance for quality control has been recognized.

    Overview

    The Optius optical process monitor was developed based on ULVAC’s rich experience in film processing systems such as sputtering and etching systems. This product can be used to control various plasma processes such as transition mode control for reactive sputtering, etching endpoint detection, cleaning and initialization status checks for a CVD chamber, and impurities monitoring in processes.

    Features

    This new product has the following features:

    1. Broad measurement wavelength range

    Monitors a wide range of wavelengths (200-1000 nm). Capable of simultaneously measuring multiple wavelengths.

    2. Simultaneous measurement of up to 5 channels

    An expansion unit (optional) enables up to 5 channels to be measured simultaneously.

    3. Feedback control

    Feedback control of external equipment by using measurement results. Useful for transition mode control (gas flow control) in reactive sputtering.

    4. Proprietary software

    Equipped with proprietary software for multiple processes such as reactive sputtering and etching. Users can freely create and edit discriminant and computing formulas.

    5. Light receiving unit

    Two types of light receiving units are available: an atmosphere type and a vacuum type. Select one according to the process.

    Sales plan and prices

    We expect to sell 20 units of the Optius optical process monitor during the first year. The price will be from 2,300,000 yen (including a light receiving unit). This product will be on sale starting April 10, 2014.

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